Sumedh P. Surwade, Feng Zhou, Bryan Wei, Wei Sun, Anna Powell, Christina O'Donnell, Peng Yin, Haitao Liu
J. Am. Chem. Soc. 135, 6778-6781 (2013)
Downloads: Article [PDF], 6 pages. Supplementary Materials [ PDF], 31 pages.
We describe a method to form custom-shaped inorganic oxide nanostructures by using DNA nanostructure templates. We show that a DNA nanostructure can modulate the rate of chemical vapor deposition (CVD) of SiO2 and TiO2 with nanometer scale spatial resolution. The resulting oxide nanostructure inherits its shape from the DNA template. This method generates both positive-tone and negative tone patterns on a wide range of substrates and is compatible with conventional silicon nanofabrication processes. Our result opens the door to use DNA nanostructure as a general purpose template for high resolution nanofabrication.
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